SMC – Compact Direct Operated 2 Port Solenoid Valve (2 Way Valve) VDW

Specifications | Diaphragm Valve for Ultra High Purity AZ

SMC – Compact Direct Operated 3 Port Solenoid Valve (3 Way Valve) for Water and Air VDW

Features | Compact Direct Operated 3 Port Solenoid Valve (3 Way Valve) for Water and Air VDW

• * The production of the VDW10/20 series was discontinued in December 2012. Please select the new VDW10/20 series.
• * Excludes the VDW10/20 series manifold
• * The production of the VDW30 series was discontinued in July 2015. Please select the VX21 series.
• * The production of the 3-port solenoid valve VDW200/300 series is continued.

SMC – Compact/Lightweight 2 Port Solenoid Valve (2 Way Valve) for Water and Air VDW-XF

Features | Compact/Lightweight 2 Port Solenoid Valve (2 Way Valve) for Water and Air VDW-XF

• Compact, lightweight resin body (PPS)
• IP65
• Power consumption: 3 W (Standard), 0.5 W (With power-saving circuit)

SMC – High Speed 2 Port Valve (2 Way Valve) SX10

Features | High Speed 2 Port Valve (2 Way Valve) SX10

• High-speed response ON: 0.45 ms, OFF: 0.4 ms (±0.05 ms)
• Long service life: 5 billion cycles or more
• High frequency: 1200 Hz
• Width: 9 mm
• Low power consumption: 4 W

SMC – Low Profile 2/3-Port Solenoid Valve SX90/090

Features | Low Profile 2/3-Port Solenoid Valve SX90/090

• Compact
  Overall length: Approx. 38 mm (2-port), 54 mm (3-port)
  Valve width/height: 10 mm
  Weight: 10 g (2-port), 20 g (3-port)
• Large flow rate
  C [dm3/(s·bar)]: 0.25 (2-port), 0.5 (3-port)
  Flow rate [L/min (ANR)]: 45 (2-port), 90 (3-port) (At 0.2 MPa)

SMC – Pilot Operated 2 Port Solenoid Valve (2 Way Valve) for Dry Air VQ

Features | Pilot Operated 2 Port Solenoid Valve (2 Way Valve) for Dry Air VQ

• High-frequency operation is possible: High-speed response 7 ms or less (VQ20), 20 ms or less (VQ30)
• Easy piping with One-touch fittings
• The dust-tight, water-jet-proof enclosure (IP65) is compatible with the DIN terminal type.
• Applications: Air-blow, Blow-off of workpieces, etc.
• Manifold type no.: VV2Q22, VV2Q32

SMC – Impact Blow Valve IBV1☐-X5/X7(-Q)

Features | Impact Blow Valve IBV1☐-X5/X7(-Q)

• Increased impact force due to higher peak pressure
• Drastic reduction in air consumption and labor time
• High peak pressure: 3 times or more (Compared with the existing model)
• Air consumption: 93% reduction
• Compact design allows for installation in narrow spaces.

SMC – Pulse Blow Valve AXTS040☐-☐☐-X2

Features | Pulse Blow Valve AXTS040☐-☐☐-X2

• The peak pressure of repeatedly colliding air permits efficient blowing.
• Air consumption: Reduced by 50% or more
• Control for pulse generation is not required. Pulse blow can be used by simply supplying air.

SMC – Compact Direct Operated 2/3-Port Solenoid Valve for Chemical Liquids LVM

Features | Compact Direct Operated 2/3-Port Solenoid Valve for Chemical Liquids LVM

• Low particle generation, Oil-free, Metal-free * Fluid contact parts
• Isolated structure The solenoid drive body is separated from the fluid area by a diaphragm.
• Power consumption: 1.0 W or less (With power saving circuit)
• Change in volume (Pumping volume): 0.01 µL or less

SMC – Direct Operated 2/3 Port Isolated Valve LVMK20/200

Features | Direct Operated 2/3 Port Isolated Valve LVMK20/200

• Low particle generation, Oil-free, Metal-free
• Fluids: Air, Water, Deionized water, Diluent, Cleaning fluid
• Isolated structure: The solenoid drive body is separated from the fluid area by a block seal.
• Easy piping
• Minimal dead space
• Flow adjustment is not required.

SMC – Pinch Valve LPV22-X1

Features | Pinch Valve LPV22-X1

• The fluid does not come into contact with the moving parts of the valve, so there is no inflow of contaminants. By discarding a tube after use, the need for a washing process is eliminated, thus ensuring good hygiene.
• Compact Valve width: 20 mm
• Power consumption : 1.5 W (Built-in power saving circuit)
• Improved tubing life Less damage to the tube due to an arc shape of the tube clamp
• Easy tubing replacement

SMC – Diaphragm Valve for Ultra High Purity AZ

Features | Diaphragm Valve for Ultra High Purity AZ

• Cleaned for high purity semiconductor applications and clean room assembled
• Helium leak tested
• SEMI Standards compliant
• User-friendly forged body

SMC – Normal Close High Vacuum Solenoid Valve XSA

Features | Normal Close High Vacuum Solenoid Valve XSA

• Minimum operating pressure: 1 × 10^-6 Pa (abs)
• Leakage: Internal 1.3 × 10^-9 Pa•m³/s, External 1.3 × 10^-11 Pa•m³/s
• 2 types of fittings and female threads are available.
• Power consumption: Max. 25% reduction
• Weight: Max. 18% lighter (0.5 kg → 0.41 kg)