SMC - High Vacuum Valves
SMC – High Vacuum Valves มีทั้งหมด 7 รุ่น แต่ละรุ่นมีขนาด, คุณสมบัติ และการใช้งานที่แตกต่างกันออกไป
1) Aluminum High Vacuum Angle Valve XLA / C / F / G
SMC – Aluminum High Vacuum Angle Valve XLA/C/F/G
Features | Aluminum High Vacuum Angle Valve XLA / C / F / G
- Aluminum bodied Uniform baking temperature Lightweight, Compact Minimal outgassing Minimal contamination from heavy metals
- Bellows are replaceable.
Specifications | Aluminum High Vacuum Angle Valve XLA / C / F / G
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA-2 | Air operated | Single acting (N.C.) |
Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLAV-2 (With solenoid valve) |
Air operated | Single acting (N.C.) |
Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLC-2 | Air operated | Double acting | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLF-2 | Air operated | Single acting (N.C.) |
O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
| XLFV-2 (With solenoid valve) |
Air operated | Single acting (N.C.) |
O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
| XLG -2 | Air operated | Double acting | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
2) Aluminum High Vacuum Angle Valve XLA / C-100 / 160(-1)-X152
SMC – Aluminum High Vacuum Angle Valve XLA/C-100/160(-1)-X152
Features | Aluminum High Vacuum Angle Valve XLA / C-100 / 160(-1)-X152
- Improved durability of bellows (Flange sizes 100 and 160)
- Service life of two million cycles
- Space required for equipment can be reduced Without restriction on exhaust direction (two ways: from valve element side to bellows side and vice versa) Increased flexibility of mounting orientation
- Lightweight, Compact
Specifications | Aluminum High Vacuum Angle Valve XLA/C-100/160(-1)-X152
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA-100 / 160-X152 | Air operated | Single acting (N.C.) |
Bellows seal | Dust free, Cleaned | 100, 160 |
| XLC-100 / 160-1-X152 | Air operated | Single acting (N.C.) |
Bellows seal | Dust free, Cleaned | 100, 160 |
3) Aluminum High Vacuum Angle Valve XL☐
SMC – Aluminum High Vacuum Angle Valve XLA
Features | Aluminum High Vacuum Angle Valve XL☐
- High fluorine resistance
- Minimal outgassing
- Minimal contamination from heavy metals
*The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been remodeled in September 2017. Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
Specifications | Aluminum High Vacuum Angle Valve XL☐
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA | Air operated | Single acting (N.C.) |
Bellows seal | Dust free, Cleaned | 16 to 160 |
| XLAV (With solenoid valve) |
Air operated | Single acting (N.C.) |
Bellows seal | Dust free, Cleaned | 16 to 160 |
| XLC | Air operated | Double acting | Bellows seal | Dust-free Cleaned | 16 to 160 |
| XLCV (With solenoid valve) |
Air operated | Double acting | Bellows seal | Dust-free Cleaned | 16 to 80 |
| XLF | Air operated | Single acting (N.C.) |
O-ring seal | High-speed operation High operating cycles |
16 to 160 |
| XLFV (With solenoid valve) |
Air operated | Single acting (N.C.) |
O-ring seal | High-speed operation High operating cycles |
16 to 160 |
| XLG | Air operated | Double acting | O-ring seal | High-speed operation High operating cycles |
16 to 160 |
| XLGV (With solenoid valve) |
Air operated | Double acting | O-ring seal | High-speed operation High operating cycles |
16 to 80 |
| XLD | Air operated | Single acting (N.C.) |
Bellows / O-ring seal | For preventing dust turbulence For preventing a pump from running overloaded |
25 to 160 |
| XLDV (With solenoid valve) |
Air operated | Single acting (N.C.) |
Bellows / O-ring seal | For preventing dust turbulence For preventing a pump from running overloaded |
25 to 160 |
| XLH | Manual | Manual | Bellows seal | Dust-free Cleaned |
16 to 50 |
| XLS | Electromagnetic | Single acting (N.C.) |
(Bellows balance) | For portable equipment not requiring air |
16, 25 |
4) Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ / XLDQ
SMC – Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ/XLDQ
Features | Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ/XLDQ
- One-touch connection and release (No tools are required.)
Specifications | Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ / XLDQ
| Series | Actuation | Shaft seal type | Valve type | Material | Flange size |
|---|---|---|---|---|---|
| XLAQ | Air operated | Bellows seal | Single acting (N.C.) |
Body : Aluminum Bellows : Stainless steel 316L |
16 to 50 |
| XLDQ | Air operated | Bellows seal O-ring seal |
Single acting (N.C.) |
Body : Aluminum Bellows : Stainless steel 316L |
40, 50 |
5) Stainless Steel High Vacuum Angle/In-line Valve XM / XY
SMC – Stainless Steel High Vacuum Angle/In-line Valve XM/XY
Features | Stainless Steel High Vacuum Angle/In-line Valve XM / XY
-
- The precision casting, unified composition prevents the accumulation of gas.
- The XM series is interchangeable with the XL series aluminum high vacuum angle valve.
Note : Size 16 is not available for the in-line type.
Specifications | Stainless Steel High Vacuum Angle/In-line Valve XM/XY
| Series | Actuation | Shaft seal type | Valve type | Material | Flange size |
|---|---|---|---|---|---|
| XMA/XYA | Air operated | Bellows seal | Single acting (N.C.) |
Body : SCS13 (Equivalent to stainless steel 304) Bellows : Stainless steel 316L |
16 to 80 Note) |
| XMC/XYC | Air operated | Bellows seal O-ring seal |
Single acting (N.C.) |
Body : SCS13 (Equivalent to stainless steel 304) Bellows : Stainless steel 316L |
16 to 80 Note) |
| XMD/XYD | Air operated | Bellows / O-ring seal | Single acting (N.C.) |
Body : SCS13 (Equivalent to stainless steel 304) Bellows : Stainless steel 316L |
25 to 80 |
| XMH/XYH | Manual | Bellows seal | Manual | Body : SCS13 (Equivalent to stainless steel 304) Bellows : Stainless steel 316L |
16 to 50 Note) |
6) Normal Close High Vacuum Solenoid Valve XSA
SMC – Normal Close High Vacuum Solenoid Valve XSA
Features | Normal Close High Vacuum Solenoid Valve XSA
- Minimum operating pressure: 1 × 10-6 Pa (abs)
- Leakage: Internal 1.3 × 10-9 Pa•m3/s, External 1.3 × 10-11 Pa•m3/s
- 2 types of fittings and female threads are available.
- Power consumption: Max. 25% reduction
- Weight: Max. 18% lighter (0.5 kg → 0.41 kg)
Specifications | Normal Close High Vacuum Solenoid Valve XSA
| Series | Valve type | Fluid | Piping | Port size |
|---|---|---|---|---|
| XSA | Normally closed | Air Inert gas |
Face seal fitting Compression fitting |
1/4, 3/8 |
| XSA | Normally closed | Air Inert gas |
Rc, NPT female thread | 1/8, 1/4, 3/8 |
7) Smooth Vent Valve XVD
SMC – Smooth Vent Valve XVD
Features | Smooth Vent Valve XVD
- The valve / needle valve-integrated construction requires only 1/4 the piping space of previous models.
- Particle numbers have been significantly reduced through the use of a metal diaphragm in the sheet portion.
- Flow of both the initial air supply and the main air supply can be adjusted.
Specifications | Normal Close High Vacuum Solenoid Valve XVD
| Series | Valve type | Fluid | Piping | Port size |
|---|---|---|---|---|
| XVD | Normally closed (Pressurize to open, Spring seal) |
Nitrogen, Air, Inert gas, etc. | VCR® Swagelok® |
1/4B |
