Hiwin Stage Gantry Structure Customization – ALB

Feature | Stage Gantry Structure Customization – ALB

  • Using non-contact air bearing.
  • Without main tenance.
  • High positioning accuracy.
  • Not easily influenced by environmental temperature.
  • With high-precision and large-size vacuum chuck.
  • Z direct jitter 100 nm.
  • vertical strainghtness up to ±1 µm.
  • Equipped with ironless motor.

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