Hiwin Dual Axis Customization – DLJ : The semiconductor wafer inspection equipment, AOI equipment.
Hiwin Stage Dual Axis Customization – DLJ
Stage Dual Axis Customization – DLJ
Feature | Stage Dual Axis Customization – DLJ
Dimensions | Stage Dual Axis Customization – DLJ
Specifications | Dual Axis Customization – DLJ
Stage type | LMX2C-SA11LAS21L-420-490+TMF42 |
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Motor Type | Ironcore(/Ironless) motor |
Stroke(mm) | X-axis : 420, Y-axis : 490 |
Peak Force(N) / Continuous Force(N) | X-axis : 254/90, Y-axis : 462/149 |
Repeatability(µm) | ±0.5 (with HIWIN solution) |
Accuracy(µm) | ±2 (after error mapping) |
Max. Acceleration(m/s2) | 6.5(with payload) |
Max. Velocity(m/s) | 0.5(with payload) |
Vertical Straightness(µm) | ±10 |
Orthogonality(arc-sec) | ±5 |
Payload(kg) | 10 |
Stage orientation | Horizontal |
Torque Motor Type | TMF42 |
Peak Torque(Nm) / Cotinuous Torque(Nm) | 3.6/1.2 |
Max. Velocity(rpm) | 120(220V) |
Repeatability(arc-sec) | ±2.5 |
Accuracy(are-sec) | ±25 |
Inertia of rotation parts(kgm2) | 0.0005 |
*Note : All specifications can be designed according to customer demand.