Hiwin Stage Gantry Structure Customization – ALA
Hiwin Gantry Structure Customization – ALA : Glass substrate exposure Application, white testing equipment, wafer defact detection equipment.
Stage Gantry Structure Customization – ALA
Feature | Stage Gantry Structure Customization – ALA
- Using non-contact air bearing.
- Without main tenance.
- High positioning accuracy.
- Not easily influenced by environmental temperature.
- With high-precision and large-size vacuum chuck.
- With passive vibrations suppressing system.
- Integrated electronic control system.
- Equipped with ironless motor.
Dimensions | Stage Gantry Structure Customization – ALA
Specifications | Stage Gantry Structure Customization – ALA
| Stage type | LMX2C-CB4CB7-50-50+TMS03 |
|---|---|
| Motor Type | Ironless motor |
| Stroke(mm) | X-axis :700, Y-axis : 800, Z-axis : 50 |
| Peak Force(N) / Continuous Force(N) | X-axis : 580/145, Y-axis : 780/195, Z-axis : HIWIN 1KW(220V) |
| Repeatability(µm) | X-axis : ±0.5, Y-axis : ±0.5, Z-axis : ±2 (with HIWIN solution) |
| Accuracy(µm) | X-axis : ±1.5, Y-axis : ±1.5, Z-axis : ±4 (after error mapping) |
| Max. Acceleration(m/s2) | X-axis : 2.5, Y-axis : 4(with payload 10kg), Z-axis : 2 (with payload 200 kg) |
| Max. Velocity(m/s) | X-axis : 0.3, Y-axis : 0.3(with payload 10kg), Z-axis : 2 (with payload 200 kg) |
| Vertical Straightness(µm) | X-axis : ±2, Y-axis : ±2, Z-axis : ±10 |
| Horizontal Straightness(µm) | X-axis : ±1, Y-axis : ±1, Z-axis : ±2 |
| Orthogonality(arc-sec) | XY-axis : ±5 |
| Payload(kg) | XY-axis : 10, Z-axis : 200 |
| Stage orientation | Horizontal |
Note : All specifications can be designed according to customer demand.
ติดต่อ Hiwin, Linear Motion, Automation, Robot, System Intregration
