Hiwin Stage Gantry Structure Customization – ALB
Hiwin Gantry Structure Customization – ALB : Glass substrate exposure Application, white testing equipment, wafer defact detection equipment.
Stage Gantry Structure Customization – ALB
Feature | Stage Gantry Structure Customization – ALB
- Using non-contact air bearing.
- Without main tenance.
- High positioning accuracy.
- Not easily influenced by environmental temperature.
- With high-precision and large-size vacuum chuck.
- Z direct jitter 100 nm.
- vertical strainghtness up to ±1 µm.
- Equipped with ironless motor.
Dimensions | Stage Gantry Structure Customization – ALB
Specifications | Stage Gantry Structure Customization – ALB
| STAGE TYPE | LMAP-CC8CB8-250-250 |
|---|---|
| Motor Type | Ironless motor |
| Stroke(mm) | X-axis :250, Y-axis : 250 |
| Peak Force(N) / Continuous Force(N) | X-axis : 780/195, Y-axis : 580/145 |
| Repeatability(µm) | ±0.75 (with HIWIN solution) |
| Accuracy(µm) | ±1.5 (after error mapping) |
| Max. Acceleration(m/s2) | 2(with payload) |
| Max. Velocity(m/s) | 0.25(with payload) |
| Vertical Straightness(µm) | ±1 |
| Horizontal Straightness(µm) | ±2 |
| Orthogonality(arc-sec) | ±3 |
| Payload(kg) | 15 |
| Stage orientation | Horizontal |
Note : All specifications can be designed according to customer demand.
ติดต่อ Hiwin, Linear Motion, Automation, Robot, System Intregration
