Hiwin Stage Multi-axes Customization – MLA
Hiwin Multi-axes Customization – MLA : Wafer cutting, the glass substrate testing equipment, wafer bonding.
Stage Multi-axes Customization – MLA
Feature | Stage Multi-axes Customization – MLA
- Integration of high-precision TMN torque motor.
- With excellent flatness (X-Yxtheta 0.01 mm).
- Water cooling design, reduce thermal deformation.
- XY Stage low center of gravity design.
- Can be equipment with iron less or ironcore motor.
Dimensions | Stage Multi-axes Customization – MLA
Specifications | Stage Multi-axes Customization – MLA
| Stage type | LMX2C-F23F43-300-300+BS-5-170+TMN93EH |
|---|---|
| Motor Type | Ironcore (/Ironless) motor & HIWIN AC Servo motor |
| Stroke(mm) | X-axis : 362, Y-axis : 390 |
| Peak Force(N)/Continuous Force(N) | X-axis : 2082/764, Y-axis : 5496/2252 |
| Repeatability(µm) | ±0.5(with HIWIN solution) |
| Accuracy(µm) | ±1(after error mapping) |
| Max. Acceleration(m/s2) | 10(with payload) |
| Max. Velocity(m/s) | 1(with payload) |
| Payload(kg) | Z-axis : 50, A-axis : 30 |
| Stage orientation | Horizontal |
| Torque Motor Type | TMN93EH |
| Peak Torque(NM)/Continuous Torque(Nm) | 45/15 |
| Max. Velocity(rpm) | 300(220V) |
| Repeatability(arc-sec) | ±2.5 |
| Accuracy(arc-sec) | ±25 |
| Inertia of rotation parts(kgm2) | 0.052 |
Note : All specifications can be designed according to customer demand.
ติดต่อ Hiwin, Linear Motion, Automation, Robot, System Intregration
