SMC - Process Gas Equipment
SMC – Process Gas Equipment มีทั้งหมด 7 รุ่น แต่ละรุ่นมีขนาด, คุณสมบัติ และการใช้งานที่แตกต่างกันออกไป
1) Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ
SMC – Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ
Features | Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ
- For UHP gas delivery in semiconductor and other clean industries
- Body material: 316L SS secondary remelt or 316L SS
- Electropolished wetted parts
- External metal seal construction
Specifications | Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ
| Series | Type | Application | Body material | Connection type | Connection size |
|---|---|---|---|---|---|
| AP/SL | Single stage | Distribution (Compact) | 316L SS secondary remelt | Face seal Tube weld | 1/4″, 3/8 |
| AP/SL | Single stage | Distribution | 316L SS secondary remelt | Face seal Tube weld |
1/4″, 3/8″ 1/2″, 3/4″ |
| AP/SL | Single stage | Bulk gas | 316L SS | Face seal Tube weld |
1/2″, 3/4″, 1″ |
| AP/SL | Single stage | Source | 316L SS secondary remelt |
Face seal Tube weld |
1/4″, 3/8″ 1/2″, 3/4″ |
| AP/SL | Single stage | Sub-atmospheric pressure | 316L SS secondary remelt |
Face seal Tube weld |
1/4″, 3/8″ 1/2″, 3/4″ |
| AP | Two stage | Source | 316L SS secondary remelt |
Face seal Tube weld |
1/4″, 3/8″ |
| AZ | Single stage | Distribution | 316L SS | Face seal Tube weld |
1/4″, 3/8″ 1/2″ |
| AZ | Single stage | Source | 316L SS | Face seal Tube weld |
1/4″, 3/8″ 1/2″ |
| AZ | Single stag | Sub-atmospheric pressure | 316L SS | Face seal Tube weld |
1/4″, 3/8″ 1/2″ |
2) Regulator/Back Pressure Regulator for General Applications AK/BP
SMC – Regulator/Back Pressure Regulator for General Applications AK/BP
Features | Regulator/Back Pressure Regulator for General Applications AK/BP
- For a wide variety of applications from semiconductor to general
- Body material of 316 SS or brass is available depending on the gas.
Specifications | Regulator/Back Pressure Regulator for General Applications AK/BP
| Series | Type | Application | Body material | Connection type | Connection size |
|---|---|---|---|---|---|
| AK | Single stage | Distribution | 316 SS or Brass | NPT female, Compression | 1/4″, 3/8″ 1/2″ |
| AK | Single stage | Source | 316 SS or Brass | NPT female, Compression | 1/4″, 3/8″ 1/2″ |
| AK | Single stage | Sub-atmospheric pressure | 316 SS or Brass | NPT female, Compression | 1/4″, 3/8″ 1/2″ |
| AK | Two stage | Source | 316 SS or Brass | NPT female, Compression | 1/4″ |
| BP | Back pressure regulator | – | 316 SS or Brass | NPT female, Compression | 1/4″ |
3) Diaphragm Valve for Ultra High Purity AP
SMC – Diaphragm Valve for Ultra High Purity AP
Features | Diaphragm Valve for Ultra High Purity AP
- For UHP gas delivery in semiconductor and other clean industries
- Used as a gas shutoff valve
- No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.
Specifications | Diaphragm Valve for Ultra High Purity AP
| Series | Type | Body material | Connection type | Connection size |
|---|---|---|---|---|
| AP | Air operated type | 316L SS secondary remelt |
Face seal Tube weld |
1/4″, 3/8″ 1/2″, 3/4″ |
| AP | Manually operated | 316L SS secondary remelt |
Face seal Tube weld |
1/4″, 3/8″ 1/2″, 3/4″ |
4) Diaphragm Valve for Ultra High Purity AZ
SMC – Diaphragm Valve for Ultra High Purity AZ
Features | Diaphragm Valve for Ultra High Purity AZ
- Cleaned for high purity semiconductor applications and clean room assembled
- Helium leak tested
- SEMI Standards compliant
- User-friendly forged body
Specifications | Diaphragm Valve for Ultra High Purity AZ
| Series | Type | Body materia | Connection type | Connection size |
|---|---|---|---|---|
| AZ | Air operated type | 316L SS | Face seal Tube weld |
1/4″, 3/8″, 1/2″ |
| AZ | Manually operated | 316L SS | Face seal Tube weld |
1/4″, 3/8″, 1/2″ |
5) Check Valve / Vacuum Generator / Flow Switch AP
SMC – Check Valve / Vacuum Generator / Flow Switch AP
Features | Check Valve / Vacuum Generator / Flow Switch AP
- Check valve
- Fluid backflow is prevented by back pressure.
- Unique design with only one moving part in the gas stream, an O-ring
- Springless structure suppresses particle generation by vibration or chattering and pressure fluctuations on the downstream side
- Vacuum generator
- Vacuum generation equipment
- Applicable to the exhaustion of unnecessary gas remaining inside the piping during gas cylinder replacement
- Flow switch
- Detects excess flow above a given flow rate caused by pipe breakage, etc.
Specifications | Check Valve / Vacuum Generator / Flow Switch AP
| Series | Type | Body materia | Connection type | Connection size |
|---|---|---|---|---|
| AP | Check valve | 316L SS secondary remelt |
Face seal Tube weld |
1/4″, 3/8″ |
| AP | Vacuum generator | 316L SS | Face seal Tube weld |
1/4″, 3/8″ |
| AP | Flow switch | 316L SS secondary remelt 316L SS | Face seal Tube weld |
1/2″. 3/4″ |
6) Diaphragm Valve for General Applications AK
SMC – Diaphragm Valve for General Applications AK
Features | Diaphragm Valve for General Applications AK
- Rc, R, and NPT connections have been added to the series.
- For a wide variety of applications from semiconductor to general
- Cleaned for O2 service
- Compact and lightweight due to the shortening of the actuator (AK3542/4542)
- M5 actuation port (AK3542/4542)
- Compact and lightweight due to the modifying of the knob design (AK3652/4652)
- The knob features a unique design that combines a scalloped round knob with a raised rectangular section to provide two choices of gripping. (AK3652/4652)
Specifications | Diaphragm Valve for General Applications AK
| Series | Type | Body materia | Connection type | Connection size |
|---|---|---|---|---|
| AK | Air operated type | 316 SS | Compression Rc, R, NPT |
1/4″，3/8″ |
| AK | Manually operated | 316 SS | Compression Rc, R, NPT |
1/4″，3/8″ |
7) Regulator for General Applications AK1000T
SMC – Regulator for General Applications AK1000T
Features | Regulator for General Applications AK1000T
- For a wide variety of applications from Semiconductor to general
- Compact and lightweight
- Weight: 0.52 kg
- Height: 97.5 mm
- MInimum dead leg construction
- Various piping configurations are availble
- Select from compression, NPT female, or Rc thread.
Specifications | Regulator for General Applications AK1000T
| Series | Type | Body materia | Connection type | Connection size |
|---|---|---|---|---|
| AK1000T | Manually operated type | 316 SS | Compression Rc, NPT |
1/4″, 3/8″ |