SMC - Other
SMC – Other Prevents the reverse flow of oil through the roughing pump (rotary pump) into the chamber
Vacuum Angle Valve with Release Valve XLJ
SMC -Vacuum Angle Valve with Release Valve XLJ
Features | Vacuum Angle Valve with Release Valve XLJ
- Prevents the reverse flow of oil through the roughing pump (rotary pump) into the chamber
- Reduced piping labor due to the built-in release valve structure
Specifications | Vacuum Angle Valve with Release Valve XLJ
| Series | Actuation | Valve type | Shaft seal type | Flange size |
|---|---|---|---|---|
| XLJ | Electromagnetic | Normally closed / Vacuum pilot | O-ring seal | 25, 40 |
