SMC – Thermo-chiller / Standard Type HRS

2) Thermo-chiller / Environmentally Resistant Type HRS-R

SMC -Thermo-chiller/Environmentally Resistant Type HRS-R

Features | Thermo-chiller / Environmentally Resistant Type HRS-R

• Resistant to dust and water splashing
• Protection of the electrical unit: IP54
• Metal panel The entire exterior surface is metal. A stainless steel panel can be selected. (Option)
• A large capacity tank (12 L) is available. (Option)
• Ambient temperature: 5 to 45°C

SMC – Thermo-chiller/Standard Type HRS090

Features | Thermo-chiller / Standard Type HRS090

• Lightweight and compact
• Cooling capacity: 9 kW
• Temperature stability: ±0.5°C
• Set temperature range: 5 to 35°C
• Max. ambient temperature: 45°C
• Power supply: 3-phase 200 to 230 VAC, 380 to 415 VAC, 460 to 480VAC

SMC – Thermo-chiller/Standard Type HRS100/150

Features | Thermo-chiller / Standard Type HRS100/150

• No heater is required, as the circulating fluid is heated using only the heat exhausted by the refrigerating circuit.
• Compatible with power supplies in Europe, Asia, Oceania, North, Central, and South America
• Low-noise design: 70 dB (A)
• Outdoor installation: IPX4
• Compact, Space saving

SMC – Thermo-chiller/Standard Type HRS200

Features | Thermo-chiller / Standard Type HRS200

• 3-phase 380 to 415 VAC (50 Hz), 3-phase 460 to 480 VAC (60 Hz)
• No heater is required, as the circulating fluid is heated using only the heat exhausted by the refrigerating circuit.
• Outdoor installation: IPX4
• Compact, Space saving

SMC – Thermo-chiller/Inverter Type HRSH090

Features | Thermo-chiller / Inverter Type HRSH090

• Power consumption reduced by 53% Complete with energy-saving triple inverter!
• Cooling capacity: 9.5 kW (Air-cooled), 11.0 kW (Water-cooled)
• Temperature stability: ±0.1°C
• Set temperature range: 5°C to 40°C

SMC – Thermo-chiller/Inverter Type HRSH

Features | Thermo-chiller / Inverter Type HRSH

• Complete with energy-saving triple inverter!
• Outdoor installation, Splashproof type (IPX4)
• Max. ambient temperature: 45℃
• Min. ambient temperature: -20℃ (For the air-cooled type)
• Temperature stability: ±0.1℃ (When a load is stable)
• Space saving and lightweight: 280 kg (25 kW type)
• Compliant with UL Standards, CE-marking

SMC -Thermo-chiller/Basic Type HRSE

Features | Thermo-chiller / Basic Type HRSE

• Complete with energy-saving triple control Reduces power consumption by 33%
• Compact and lightweight: 32 kg (100 VAC)
• Maintenance-free: Magnet pump
• Low-noise design: 55 dB (A)

SMC – Thermo-chiller/Dual Channel Refrigerated Thermo-chiller for Lasers HRL

Features | Thermo-chiller / Dual Channel Refrigerated Thermo-chiller for Lasers HRL

• Temperatures for 2 fluid channel systems can be controlled individually by one chiller.
• Space saving, Reduced wiring Footprint: 22% reduction One power supply system for 2 channels
• Energy saving Power consumption reduced by 30%
• Touch panel
• Power supply: 3-phase 380 to 415 VAC (50/60 Hz) 3-phase 460 to 480 VAC (60 Hz)

SMC – Thermo-chiller Compact Dual/Basic Type for Lasers HRLE

Features | Thermo-chiller Compact Dual/Basic Type for Lasers HRLE

• The temperatures of 2 fluid channel systems can be controlled individually by 1 chiller.
• Space saving, Reduced wiring Footprint reduced by 21% One power supply system for 2 channels
• Energy saving Power consumption reduced by 17%

SMC – Thermo-chiller / Rack Mount Type HRR

Features | Thermo-chiller / Rack Mount Type HRR

• Operable without the need to remove the unit from the rack Front access: Simple to control, service, and maintain with all filters and drainage accessible via the front panel
• Space saving: Multiple chillers can be mounted to a 19-inch rack.
• Cooling capacity: 1.1/1.2/1.8/2.4/3.0/5.1 kW (60 Hz)
• Temperature stability: ±0.1℃
• Global power supply:
  • Single-phase 100 VAC (50/60 Hz)/115 VAC (60 Hz)
  • Single-phase 200 to 230 VAC (50/60 Hz)

SMC – EU F-Gas Regulation-compliant Refrigerated Thermo-chiller HRZ-F

Features | EU F-Gas Regulation-compliant Refrigerated Thermo-chiller HRZ-F

• More effective energy-saving is achieved through use of a DC inverter compressor and an inverter pump.
• Energy saving
  • The inverter controls the number of motor rotations of the compressor and pump according to the load from the user’s application.
  • Power consumption: Max. 65% reduction
  • Facility water: Max. 67% reduction
• High performance
  • Temperature stability: ±0.1°C (When a load is stable)
  • Cooling time: Max. 46% reduction (SMC comparison)
• Refrigerant: R410A (HFC) / R448A (HFC/HFO)

SMC – Thermo-chiller / High-performance Type HRZ

Features | Thermo-chiller / High-performance Type HRZ

• Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
• Compliant with various safety standards
• Compliant with UL Standards, SEMI Standards, CE-marking
• * The HRZ series will be remodeled in December 2021. Please select the HRZ-F series.

SMC – Thermo-chiller / High-performance Inverter Type HRZ

Features | Thermo-chiller / High-performance Inverter Type HRZ

• In addition to the state-of-the-art functions of the HRZ series, these models employ a DC inverter compressor to achieve better energy efficiency.
• A wide temperature range and cooling capacity range are covered by one unit.
• Suited to the short innovation cycle of semiconductor equipment, Capable of responding flexibly to changes in the process conditions
• Compliant with UL Standards, SEMI Standards, CE-marking
• * The HRZ series will be remodeled in December 2021. Please select the HRZ-F series.

SMC – Dual Thermo-chiller/High-performance Inverter Type HRZD

Features | Dual Thermo-chiller / High-performance Inverter Type HRZD

• Temperatures for 2 systems can be controlled separately by one chiller.
• Double inverter type: Substantially more energy is saved by using a DC inverte refrigerator and inverter pump.
• Space saving: Footprint reduced by 23%
• Reduced wiring, piping, and labor: Single power cable, Single facility-water piping system
• Compliant with SEMI Standards, CE-marking

SMC – Water-cooled Thermo-chiller / High-performance Type HRW

Features | Water-cooled Thermo-chiller / High-performance Type HRW

• Direct heat exchanger for in-plant circulating fluid
• Can control the temperature over a wide range since a compressor is not required.
• Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
• Compliant with UL Standards, SEMI Standards, CE-marking
• It is possible to select the inverter type.